Difference between revisions of "MicrON Clean Room"
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The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication. | The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication. | ||
=See Also= | =See Also= | ||
| − | * [ | + | * [http://www.nanovt.org.vt.edu/ NanoVT] |
=External Links= | =External Links= | ||
* [http://www.micron.ece.vt.edu/ MicrON Clean Room homepage] | * [http://www.micron.ece.vt.edu/ MicrON Clean Room homepage] | ||
| − | [[Category: | + | [[Category:Campus computing resources]] |
Latest revision as of 22:43, 3 January 2019
The MicrON Clean Room at Virginia Tech is housed in Whittemore Hall. It is capable features sizes down to 1 micron. The facility is primarily used for MEMS fabrication.
