Difference between revisions of "MicrON Clean Room"
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The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication. | The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication. | ||
Revision as of 03:42, 3 January 2018
Unrelated to VTLUUG
The MicrON Clean Room at Virginia Tech is housed in Whittemore Hall. It is capable features sizes down to 1 micron. The facility is primarily used for MEMS fabrication.
