Difference between revisions of "MicrON Clean Room"
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* [http://www.micron.ece.vt.edu/ MicrON Clean Room homepage] | * [http://www.micron.ece.vt.edu/ MicrON Clean Room homepage] | ||
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Latest revision as of 22:43, 3 January 2019
The MicrON Clean Room at Virginia Tech is housed in Whittemore Hall. It is capable features sizes down to 1 micron. The facility is primarily used for MEMS fabrication.