Difference between revisions of "MicrON Clean Room"
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| − | The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w: | + | The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication. |
=See Also= | =See Also= | ||
Revision as of 10:29, 13 September 2010
The MicrON Clean Room at Virginia Tech is housed in Whittemore Hall. It is capable features sizes down to 1 micron. The facility is primarily used for MEMS fabrication.
