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The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_µm_process1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication.
=See Also=
* [[http://www.nanovt.org.vt.edu/ NanoVT]]
=External Links=
* [http://www.micron.ece.vt.edu/ MicrON Clean Room homepage]
[[Category:Electrical and Computer EngineeringCampus computing resources]]