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The '''MicrON Clean Room''' at Virginia Tech is housed in [[Whittemore Hall]]. It is capable features sizes down to [[w:1_%C2%B5m_process|1 micron]]. The facility is primarily used for [[MEMS]] fabrication. =See Also=* [http://www.nanovt.org.vt.edu/ NanoVT] =External Links=* [http://www.micron.ece.vt.edu/ MicrON Clean Room homepage] [[Category:Pending deletionCampus computing resources]]