MicrON Clean Room

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The MicrON Clean Room at Virginia Tech is housed in Whittemore Hall. It is capable features sizes down to 1 micron. The facility is primarily used for MEMS fabrication.

See Also

NanoVT

External Links

MicrON Clean Room homepage

Retrieved from "https://vtluug.org/w/index.php?title=MicrON_Clean_Room&oldid=2532"

Electrical and Computer Engineering